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Title: Micromechanics on silicon

Creator:

Dziuban Jan

Date issued/created:

1996

Resource type:

Text

More

Subtitle:

MST News Poland 3/1996.

Publisher:

Institute of Electronic Materials Technology

Place of publishing:

Warszawa

Description:

s. 3-7 : il. ; 30 cm ; Bibliogr. s. 6-7

Type of object:

Book/Chapter

Relation:

MST News Poland

Issue:

3

Start page:

3

End page:

7

Detailed Resource Type:

Article

Format:

application/pdf

Resource Identifier:

oai:rcin.org.pl:38993

Source:

ITME, sygn. ; click here to follow the link

Language:

eng

Rights:

Rights Reserved - Free Access

Terms of use:

Copyright-protected material. May be used within the limits of statutory user freedoms

Digitizing institution:

Institute of Electronic Materials Technology

Original in:

Library of the Institute of Electronic Materials Technology

Projects co-financed by:

Programme Innovative Economy, 2010-2014, Priority Axis 2. R&D infrastructure ; European Union. European Regional Development Fund

Access:

Open

Subject and keywords:

micromechanics Si

Object collections:

• Digital Repository of Scientific Institutes > Partners' collections > Łukasiewicz Research Network - Institute of Microelectronics and Photonics > Articles
• Digital Repository of Scientific Institutes > Literature > Books/Chapters

Last modified:

Nov 5, 2014

In our library since:

Jan 27, 2014

Number of object content downloads / hits:

547

All available object's versions:

https://rcin.org.pl./publication/55851

Show description in RDF format:

RDF

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RDFa

Show description in OAI-PMH format:

OAI-PMH

• ARTYKUŁY
  • Piotrowski Józef, Micro-machined silicon bolometers and thermal emitters
  • Korona Krzysztof, Ultraviolet-sensitive, visible-blind GaN detectors grown by MOCVD epitaxy
  • Dziuban Jan, Micromechanics on silicon
  • Dybko Artur, Fiber optic pH sensor for environmental application
  • Kordyasz A.J. Silicon ball - OSIRIS charge multiplicity filter
  • Pisarkiewicz Tadeusz, Semiconducting detectors of oxidizing gases
  • Nossarzewska-Orłowska Elżbieta, Silicon for MST applications
  • Kozłowska Anna, The measurement of thermally induced in-plane displacements using fibre-optic grating interferometry
  • Dobrzański Lech, Mask shop at the Institute of Electronic Materials Technology
  • Węgrzecka Iwona, Silicon avalanche photodiodes developed at Institute of Electron Technology
  • Hechner Judyta, SAW NO2 sensors employing copper phthalcyjanine as a sensitive layer
  • Kurth Steffen, Mirror arrays for laser beam deflection
  • Tvarozek Vladimir, Thin-film electrode chips microelectrochemical sensors
  • Szeliga Paweł, Matrixes of planar microlenses

Edition name	Date
Dziuban Jan, Micromechanics on silicon	Nov 5, 2014

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