@misc{Dziuban_Jan_Micromechanics_1996,
 author={Dziuban Jan},
 number={3},
 copyright={Rights Reserved - Free Access},
 journal={MST News Poland},
 address={Warszawa},
 howpublished={online},
 year={1996},
 publisher={Institute of Electronic Materials Technology},
 language={eng},
 title={Micromechanics on silicon},
 type={Text},
 URL={http://rcin.org.pl./Content/38993/PDF/WA901_55851_r1996-z3_MST-Dziuban-micro_i.pdf},
 keywords={micromechanics, Si},
}