A note on optical materials for photolithography applications - Digital Repository of Scientific Institutes

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A note on optical materials for photolithography applications

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Title: A note on optical materials for photolithography applications

Creator:

Jain, A. ; Roszkiewicz, A. ; Nasalski, W.

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Relation:

IPPT Reports on Fundamental Technological Research

Resource Identifier:

oai:rcin.org.pl:142952

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Rights:

Creative Commons Attribution BY 4.0 license

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Copyright-protected material. [CC BY 4.0] May be used within the scope specified in Creative Commons Attribution BY 4.0 license, full text available at: ; -

Digitizing institution:

Institute of Fundamental Technological Research of the Polish Academy of Sciences

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Last modified:

Oct 14, 2020

In our library since:

Oct 14, 2020

Number of object content downloads / hits:

76

All available object's versions:

https://rcin.org.pl./publication/178315

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Edition name	Date
Jain, A., 2018, A note on optical materials for photolithography applications	Oct 14, 2020

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