@misc{Jain_A._A_2018, author={Jain, A. and Roszkiewicz, A. and Nasalski, W.}, copyright={Creative Commons Attribution BY 4.0 license}, address={Warszawa}, journal={IPPT Reports on Fundamental Technological Research}, howpublished={online}, year={2018}, publisher={IPPT PAN}, language={eng}, type={Text}, title={A note on optical materials for photolithography applications}, URL={http://rcin.org.pl./Content/142952/PDF/WA727_178315_Jain-A-note.pdf}, }