Title:

A note on optical materials for photolithography applications

Creator:

Jain, A. ; Roszkiewicz, A. ; Nasalski, W.

Publisher:

IPPT PAN

Place of publishing:

Warszawa

Date issued/created:

2018

Type of object:

Book/Chapter

Relation:

IPPT Reports on Fundamental Technological Research

Resource type:

Text

Language:

eng

Rights:

Creative Commons Attribution BY 4.0 license

Terms of use:

Copyright-protected material. [CC BY 4.0] May be used within the scope specified in Creative Commons Attribution BY 4.0 license, full text available at: ; -

Digitizing institution:

Institute of Fundamental Technological Research of the Polish Academy of Sciences

Access:

Open