Title:

Poprawa jakości polerowanych płytek SiC metodą chemicznego utleniania i obróbki termicznej. Badania jakości powierzchni metodami rentgenowskimi = Improvement of the quality of SiC wafers polished using chemical oxidation and heat treatment. Examination of the quality of the surface using X-ray technoques

Subtitle:

Materiały Elektroniczne 2012 T.40 nr 2

Creator:

Sakowska Halina

Contributor:

Mazur Krystyna ; Teklińska Dominika ; Wierzchowski Wojciech ; Wieteska Krzysztof ; Gała Maciej

Publisher:

ITME

Place of publishing:

Warszawa

Date issued/created:

2012

Description:

s. 3-10 : il. 30 cm

Subject and Keywords:

Electronic - journal - materials ; Electronic - materials ; SiC ; catalytic oxidation ; polishing

Relation:

Electronic Materials

Volume:

40

Issue:

2

Start page:

3

End page:

10

Resource type:

Text

Detailed Resource Type:

Article

Format:

application/pdf

Source:

ITME, sygn. dostępny ; click here to follow the link

Language:

pol

Rights:

Rights Reserved - Free Access

Terms of use:

Copyright-protected material. May be used within the limits of statutory user freedoms

Digitizing institution:

Institute of Electronic Materials Technology

Original in:

Library of the Institute of Electronic Materials Technology

Projects co-financed by:

Programme Innovative Economy, 2010-2014, Priority Axis 2. R&D infrastructure ; European Union. European Regional Development Fund

Access:

Open