Title:

Badanie mikroporowatości polerowanej powierzchni płytek krzemowych w celu dostosowania sposobu ich wytwarzania do nowych wymagań jakościowych = Study of micro-roughness of the polished surface of silicon wafers aimed at fulfilling the new quality requirements

Subtitle:

Materiały Elektroniczne 2012 T.40 nr 2

Creator:

Piątkowski Bronisław

Contributor:

Szymański Sławomir

Publisher:

ITME

Place of publishing:

Warszawa

Date issued/created:

2012

Description:

s. 28-33 : il. 30 cm

Subject and Keywords:

Electronic - journal - materials ; Electronic - materials ; silicon wafers ; surface micro-roughness

Relation:

Electronic Materials

Volume:

40

Issue:

2

Start page:

28

End page:

33

Resource type:

Text

Detailed Resource Type:

Article

Format:

application/pdf

Source:

ITME, sygn. dostępny ; click here to follow the link

Language:

pol

Rights:

Rights Reserved - Free Access

Terms of use:

Copyright-protected material. May be used within the limits of statutory user freedoms

Digitizing institution:

Institute of Electronic Materials Technology

Original in:

Library of the Institute of Electronic Materials Technology

Projects co-financed by:

Programme Innovative Economy, 2010-2014, Priority Axis 2. R&D infrastructure ; European Union. European Regional Development Fund

Access:

Open