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Micro-machined silicon bolometers and thermal emitters
Subtitle: Creator: Contributor: Publisher:Institute of Electronic Materials Technology
Place of publishing: Date issued/created: Description: Type of object: Subject and Keywords:micromechanics ; microbolometers
Relation: Resource type: Detailed Resource Type: Format: Source: Language: Rights: Terms of use:Copyright-protected material. May be used within the limits of statutory user freedoms
Digitizing institution:Institute of Electronic Materials Technology
Original in:Library of the Institute of Electronic Materials Technology
Projects co-financed by:Programme Innovative Economy, 2010-2014, Priority Axis 2. R&D infrastructure ; European Union. European Regional Development Fund
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