Title:

Electrical properties of nitrogen-enriched silicon single crystals

Subtitle:

Właściwości elektryczne monokryształów krzemu wzbogaconych w azot

Creator:

Kamiński Paweł

Contributor:

Kwastarz Michał ; Surma Barbara

Publisher:

ITME

Place of publishing:

Warszawa

Date issued/created:

2015

Description:

Bibliogr. p.:37-38 ; p.: 31-38 il. 30 cm.

Subject and Keywords:

high-resistivity silicon single crystals ; FZ ; nitrogen doping

Relation:

Electronic Materials Vol. 43 Issue 4 2015

Volume:

43

Issue:

4

Start page:

31

End page:

38

Resource type:

Text

Detailed Resource Type:

Article

Format:

application/pdf

Resource Identifier:

02090058

Source:

click here to follow the link

Language:

pol

Language of abstract:

eng

Rights:

Rights Reserved - Free Access

Terms of use:

Copyright-protected material. May be used within the limits of statutory user freedoms

Digitizing institution:

Institute of Electronic Materials Technology

Original in:

Library of the Electronic Materials Technology Institute

Projects co-financed by:

Programme Innovative Economy, 2010-2014, Priority Axis 2. R&D infrastructure ; European Union. European Regional Development Fund

Access:

Open