Title:

Zintegrowany proces otrzymywania monokryształów Si GaAs metodą Czochralskiego z hermetyzacją cieczową = Integrated process of SI GaAs crystals manufacturing by the liquid encapsulated Czochralski method

Subtitle:

Materiały Elektroniczne 2012 T.40 nr 3

Creator:

Hruban Andrzej

Contributor:

Orłowski Wacław ; Mirowska Aleksandra ; Strzelecka Stanisława ; Piersa Mirosław ; JJurkiewicz-Wegner Elżbieta ; Materna Andrzej ; Dalecki Wojciech

Publisher:

ITME

Place of publishing:

Warszawa

Date issued/created:

2012

Description:

s. 38-47 : il. 30 cm

Subject and Keywords:

Electronic - journal - materials ; Electronic - materials ; SI GaAs ; LEC thermal annealing ; EPD

Relation:

Electronic Materials

Volume:

40

Issue:

3

Start page:

38

End page:

47

Resource type:

Text

Detailed Resource Type:

Article

Format:

application/pdf

Source:

ITME, sygn. dostępny ; click here to follow the link

Language:

pol

Rights:

Rights Reserved - Free Access

Terms of use:

Copyright-protected material. May be used within the limits of statutory user freedoms

Digitizing institution:

Institute of Electronic Materials Technology

Original in:

Library of the Institute of Electronic Materials Technology

Projects co-financed by:

Programme Innovative Economy, 2010-2014, Priority Axis 2. R&D infrastructure ; European Union. European Regional Development Fund

Access:

Open