Title:

Krzemowe warstwy epitaksjalne o grubości powyżej 20 um = Silicon epitaxial layers of thickness above 20 um

Subtitle:

Materiały Elektroniczne 1976 nr 4(16)

Creator:

Nossarzewska-Orłowska Elżbieta

Contributor:

Lachowski Andrzej

Publisher:

Wydaw. Przemysłu Maszynowego "WEMA"

Place of publishing:

Warszawa

Date issued/created:

1976

Description:

s. 54-[59] : il. ; 24 cm ; Bibliogr. s. [54]

Subject and Keywords:

Electronic - journal - material ; Electronic - materials ; silicon epitaxial layer ; layer thickness ; Si

Relation:

Electronic Materials

Volume:

16

Issue:

4

Start page:

54

End page:

59

Resource type:

Text

Detailed Resource Type:

Article

Format:

application/pdf

Source:

ITME, sygn. dostępny ; click here to follow the link

Language:

pol

Rights:

Rights Reserved - Free Access

Terms of use:

Copyright-protected material. May be used within the limits of statutory user freedoms

Digitizing institution:

Institute of Electronic Materials Technology

Original in:

Library of the Institute of Electronic Materials Technology

Projects co-financed by:

Programme Innovative Economy, 2010-2014, Priority Axis 2. R&D infrastructure ; European Union. European Regional Development Fund

Access:

Open