Title:

Krzemowe warstwy epitaksjalne o zmiennym profilu rezystywności = Silicon epitaxial layers with profiled resistivity

Subtitle:

Materiały Elektroniczne 1985 nr 2(50)

Creator:

Nossarzewska-Orłowska Elżbieta

Contributor:

Tomaszewski Jacek ; Brzozowski Andrzej ; Sarnecki Jerzy

Publisher:

Wydaw. Przemysłu Maszynowego "WEMA"

Place of publishing:

Warszawa

Date issued/created:

1985

Description:

s. 36-42 : il. ; 24 cm. ; Bibliogr. s. 42

Subject and Keywords:

Electronic - journal - material ; Electronic materials ; epitaxial layer ; Si ; resistivity profile

Relation:

Electronic Materials

Volume:

50

Issue:

2

Start page:

36

End page:

42

Resource type:

Text

Detailed Resource Type:

Article

Format:

application/pdf

Source:

ITME, sygn. dostępny ; click here to follow the link

Language:

pol

Rights:

Rights Reserved - Free Access

Terms of use:

Copyright-protected material. May be used within the limits of statutory user freedoms

Digitizing institution:

Institute of Electronic Materials Technology

Original in:

Library of the Electronic Materials Technology Institute

Projects co-financed by:

Programme Innovative Economy, 2010-2014, Priority Axis 2. R&D infrastructure ; European Union. European Regional Development Fund

Access:

Open