Title:

Badanie jednorodności oporności krzemowych warstw epitaksjalnych = Investigations of homogenity of silicon epitaxial layers resistivity

Subtitle:

Materiały Elektroniczne 1975 nr 4(12)

Creator:

Nowysz Karol

Contributor:

Surma Barbara

Publisher:

Wydaw. Przemysłu Maszynowego "WEMA"

Place of publishing:

Warszawa

Date issued/created:

1975

Description:

s. 33-[41] : il. ; 24 cm. ; Bibliogr. s. [41]

Subject and Keywords:

Electronic - journal - materials ; Electronic - materials ; resistivity ; silicon epitaxial layer

Relation:

Electronic Materials

Volume:

12

Issue:

4

Start page:

33

End page:

41

Resource type:

Text

Detailed Resource Type:

Article

Format:

application/pdf

Source:

ITME, sygn. dostępny ; click here to follow the link

Language:

pol

Rights:

Rights Reserved - Free Access

Terms of use:

Copyright-protected material. May be used within the limits of statutory user freedoms

Digitizing institution:

Institute of Electronic Materials Technology

Original in:

Library of the Electronic Materials Technology Institute

Projects co-financed by:

Programme Innovative Economy, 2010-2014, Priority Axis 2. R&D infrastructure ; European Union. European Regional Development Fund

Access:

Open