Title:

Modyfikacja technologii polerowania płytek GaSb stosowanych jako podłoża w procesie epitaksji = Modification of mechanical-chemical treatment technology of epi-ready GaSb substrates

Subtitle:

Electronic Materials T. 42 Nr 2

Creator:

Smoczyński, Dariusz

Publisher:

ITME

Place of publishing:

Warszawa

Date issued/created:

2014

Description:

Bibliogr. s.: 12 ; 5.: 5-12 il., 30 cm.

Type of object:

Book/Chapter

Subject and Keywords:

GaSb ; mechanical - chemical treatment ; roughness ; oxidation ; epitaxy

References:

s.: 12

Relation:

Electronic Materials T. 42 Nr 2 2014

Volume:

42

Issue:

2

Start page:

5

End page:

12

Resource type:

Text

Detailed Resource Type:

Article

Format:

application/pdf

Source:

click here to follow the link

Language:

pol

Rights:

Rights Reserved - Free Access

Terms of use:

Copyright-protected material. May be used within the limits of statutory user freedoms

Digitizing institution:

Institute of Electronic Materials Technology

Original in:

Library of the Electronic Materials Technology Institute

Projects co-financed by:

Programme Innovative Economy, 2010-2014, Priority Axis 2. R&D infrastructure ; European Union. European Regional Development Fund

Access:

Open