Title:

Technologia wytwarzania i optymalizacja parametrów dyfrakcyjnych elementów optycznych otrzymywanych przy użyciu elektronolitografii. Publiczna obrona rozprawy doktorskiej = Fabrication technology and optimization of diffractic optical elements obtained by using electron beam lithography

Subtitle:

Prace doktorskie

Creator:

Kowalik Andrzej

Contributor:

Jaroszewicz, Zbigniew : Promotor.

Publisher:

ITME

Place of publishing:

Warszawa

Date issued/created:

2007

Description:

160 s.: rys., 30 cm. ; Bibliogr. s. 151-160

Type of object:

Book/Chapter

Subject and Keywords:

Electronic - materials ; diffractive optical element ; diffractive lens ; electron-beam lithography ; reactive ion etching

Relation:

PhD Dissertations

Start page:

1

End page:

160

Resource type:

Text

Detailed Resource Type:

PhD Dissertations

Format:

application/pdf

Source:

ITME, sygn. P/2216 ; click here to follow the link

Language:

pol

Rights:

Rights Reserved - Free Access

Terms of use:

Copyright-protected material. May be used within the limits of statutory user freedoms

Digitizing institution:

Institute of Electronic Materials Technology

Original in:

Library of the Electronic Materials Technology Institute

Projects co-financed by:

Programme Innovative Economy, 2010-2014, Priority Axis 2. R&D infrastructure ; European Union. European Regional Development Fund

Access:

Open