Title:

Azotek krzemu stosowany w technologii planarnych fotodiod wykonanych na bazie InP = Silicon nitride for InP based planar photodiode applications

Subtitle:

Materiały Elektroniczne 2008 T.36 nr 4

Creator:

Zynek Jadwiga

Publisher:

ITME

Place of publishing:

Warszawa

Date issued/created:

2008

Description:

Bibliogr. s. 111-112 ; 95-112 s. : il. 24 cm.

Subject and Keywords:

Electronic - journal - materials ; Electronic - materials ; silicon nitride ; PECVD ; planar photodiode ; InP

Relation:

Electronic Materials

Volume:

36

Issue:

4

Start page:

95

End page:

112

Resource type:

Text

Detailed Resource Type:

Article

Format:

application/pdf

Source:

ITME, sygn. dostępny ; click here to follow the link

Language:

pol

Rights:

Rights Reserved - Free Access

Terms of use:

Copyright-protected material. May be used within the limits of statutory user freedoms

Digitizing institution:

Institute of Electronic Materials Technology

Original in:

Library of the Electronic Materials Technology Institute

Projects co-financed by:

Programme Innovative Economy, 2010-2014, Priority Axis 2. R&D infrastructure ; European Union. European Regional Development Fund

Access:

Open