Title:

Wpływ obecności Fe i Ni na własności krzemowych warstw epitaksjalnych = Influence of Ni and Fe on silicon epitaxial layers properties

Subtitle:

Materiały Elektroniczne 1994 T.22 nr 2

Creator:

Nossarzewska-Orłowska, Elżbieta

Contributor:

Sarnecki Jerzy ; Wodzińska Halina ; Skwarcz Jerzy

Publisher:

ITME

Place of publishing:

Warszawa

Date issued/created:

1994

Description:

11-24 s. : il. ; 24 cm. ; Bibliogr. s. 24

Subject and Keywords:

Electronic - materials ; Electronic - journal - materials ; silicon epitaxial layer ; transition metal ; dielectric properties

Relation:

Electronic Materials

Volume:

22

Issue:

2

Start page:

11

End page:

24

Resource type:

Text

Detailed Resource Type:

Article

Format:

application/pdf

Source:

ITME, sygn. dostępny ; click here to follow the link

Language:

pol

Rights:

Rights Reserved - Free Access

Terms of use:

Copyright-protected material. May be used within the limits of statutory user freedoms

Digitizing institution:

Institute of Electronic Materials Technology

Original in:

Library of the Electronic Materials Technology Institute

Projects co-financed by:

Programme Innovative Economy, 2010-2014, Priority Axis 2. R&D infrastructure ; European Union. European Regional Development Fund

Access:

Open