Title:

Badania elipsometryczne krzemu implantowanego fosforem = Ellipsometric studies of P+ implanted silicon

Subtitle:

Materiały Elektroniczne 1987 nr 2(58)

Creator:

Gawlik Grzegorz

Publisher:

Wydaw. Przemysłu Maszynowego "WEMA"

Place of publishing:

Warszawa

Date issued/created:

1987

Description:

s. 33-36 : il. ; 24 cm. ; Bibliogr. s. 36

Subject and Keywords:

Electronic - journal - material ; Electronic materials ; ellipsometric studies ; implanted silicon

Relation:

Electronic Materials

Volume:

58

Issue:

2

Start page:

33

End page:

36

Resource type:

Text

Detailed Resource Type:

Article

Format:

application/pdf

Source:

ITME, sygn. dostępny ; click here to follow the link

Language:

pol

Rights:

Rights Reserved - Free Access

Terms of use:

Copyright-protected material. May be used within the limits of statutory user freedoms

Digitizing institution:

Institute of Electronic Materials Technology

Original in:

Library of the Electronic Materials Technology Institute

Projects co-financed by:

Programme Innovative Economy, 2010-2014, Priority Axis 2. R&D infrastructure ; European Union. European Regional Development Fund

Access:

Open