Title:

Przyczyny rozrzutów rezystywności krzemowych warstw epitaksjalnych w układach wielowarstwowych = The effective causes of the nanuniformity of the silicon epitaxial layers resistivity in multilayer structures

Subtitle:

Materiały Elektroniczne 1980 nr 3/4(31/32)

Creator:

Tomaszewski Jacek

Contributor:

Korec Jacek ; Nossarzewska-Orłowska Elżbieta ; Brzozowski Andrzej

Publisher:

Wydaw. Przemysłu Maszynowego "WEMA"

Place of publishing:

Warszawa

Date issued/created:

1981

Description:

s. 40-53 : il. ; 24 cm. ; Bibliogr. s. 53

Subject and Keywords:

Electronic - journal - materials ; Electronic - materials ; silicon epitaxial layer ; resistivity

Relation:

Electronic Materials

Volume:

31/32

Issue:

4

Start page:

40

End page:

53

Resource type:

Text

Detailed Resource Type:

Article

Format:

application/pdf

Source:

ITME, sygn. dostępny ; click here to follow the link

Language:

pol

Rights:

Rights Reserved - Free Access

Terms of use:

Copyright-protected material. May be used within the limits of statutory user freedoms

Digitizing institution:

Institute of Electronic Materials Technology

Original in:

Library of the Electronic Materials Technology Institute

Projects co-financed by:

Programme Innovative Economy, 2010-2014, Priority Axis 2. R&D infrastructure ; European Union. European Regional Development Fund

Access:

Open