@misc{Dobrzański_Lech_Mask_1997,
 author={Dobrzański Lech},
 editor={Kowalik Andrzej},
 number={3},
 copyright={Rights Reserved - Free Access},
 journal={MST News Poland},
 address={Warszawa},
 howpublished={online},
 year={1997},
 publisher={Institute of Electronic Materials Technology},
 language={eng},
 title={Mask shop at the Institute of Electronic Materials Technology},
 type={Text},
 URL={http://rcin.org.pl./Content/39006/PDF/WA901_55857_r1997-z3_MST-Dobrzanski-mask_i.pdf},
 keywords={submicron lithography, mask},
}