@misc{Łazowy_Barbara_Chemiczne_1976,
 author={Łazowy Barbara},
 volume={16},
 number={4},
 copyright={Rights Reserved - Free Access},
 journal={Electronic Materials},
 address={Warszawa},
 howpublished={online},
 year={1976},
 publisher={Wydaw. Przemysłu Maszynowego "WEMA"},
 language={pol},
 title={Chemiczne trawienie płytek krzemu w mieszaninie HNO3-HF-CH3COOH = Chemical etching of silicon wafers in a HNO3-HF-CH3COOH mixture},
 type={Text},
 URL={http://rcin.org.pl./Content/27266/PDF/WA901_45236_M1_r1976-z4-16_Mater-Elektron-Lazo_i.pdf},
 keywords={Electronic - journal - material, Electronic - material, chenical etching, silicon wafer},
}