@misc{Nossarzewska-Orłowska_Elżbieta_Characterization_1992, author={Nossarzewska-Orłowska Elżbieta}, volume={20}, editor={Kamiński Paweł}, editor={Sarnecki Jerzy}, editor={Kozłowski Roman}, number={4}, copyright={Rights Reserved - Free Access}, journal={Electronic Materials}, address={Warszawa}, howpublished={online}, year={1992}, publisher={ITME}, language={eng}, title={Characterization of epitaxial silicon for MOS VLSI IC by deep level transsient spectroscopy and minority carrier lifetime measurements =}, type={Text}, URL={http://rcin.org.pl./Content/11879/PDF/WA901_14200_M1_r1992-t20-z4_Mater-Elektroniczne_Nossarzewska_i.pdf}, keywords={Electronic - materials, epitaxial layer, minority carrier lifetime}, }